TREA

Hiroto Takenaka

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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma treatment method and apparatus
    • Patent number 6,991,701
    • Issue date Jan 31, 2006
    • Tokyo Electron Limited
    • Hiroto Takenaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma treatment method and apparatus
    • Patent number 6,544,380
    • Issue date Apr 8, 2003
    • Tokyo Electron Limited
    • Masayuki Tomoyasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma treatment method and apparatus
    • Patent number 6,264,788
    • Issue date Jul 24, 2001
    • Tokyo Electron Limited
    • Masayuki Tomoyasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma treatment method utilizing an amplitude-modulated high frequ...
    • Patent number 6,106,737
    • Issue date Aug 22, 2000
    • Tokyo Electron Limited
    • Masayuki Tomoyasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma treatment method and apparatus
    • Publication number 20040026372
    • Publication date Feb 12, 2004
    • TOKYO ELECTRON LIMITED
    • Hiroto Takenaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma treatment method and apparatus
    • Publication number 20020088547
    • Publication date Jul 11, 2002
    • TOKYO ELECTRON LIMITED
    • Masayuki Tomoyasu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...