Hirotsugu Sugiura

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming high aspect ratio features
- Patent number 12,125,700
- Issue date Oct 22, 2024
- ASM IP Holding B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a nitrogen-containing carbon film and system for...
- Patent number 12,068,154
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Hirotsugu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20240150898
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Yoshiyuki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING TREATED SILICON-CARBON MATERIAL
- Publication number 20240047198
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Hirotsugu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CARBON FILM AND FILM FORMING APPARATUS
- Publication number 20240011151
- Publication date Jan 11, 2024
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FILLING GAP WITH FLOWABLE CARBON LAYER
- Publication number 20220336204
- Publication date Oct 20, 2022
- ASM IP HOLDING B.V.
- Ryo Miyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FILLING RECESSES ON SUBSTRATE SURFACE, STRUCTURES FORMED...
- Publication number 20220251707
- Publication date Aug 11, 2022
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A NITROGEN-CONTAINING CARBON FILM AND SYSTEM FOR...
- Publication number 20210320003
- Publication date Oct 14, 2021
- ASM IP HOLDING B.V.
- Hirotsugu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A STRUCTURE INCLUDING CARBON MATERIAL, STRUCTURE...
- Publication number 20210238742
- Publication date Aug 5, 2021
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING HIGH ASPECT RATIO FEATURES
- Publication number 20210225642
- Publication date Jul 22, 2021
- ASM IP HOLDING B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS

Hirotsugu Sugiura

Person

Patents Grantslast 30 patents

Method of forming high aspect ratio features

Method of forming a nitrogen-containing carbon film and system for...

Patents Applicationslast 30 patents

CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS

METHOD OF FORMING TREATED SILICON-CARBON MATERIAL

METHOD FOR FORMING CARBON FILM AND FILM FORMING APPARATUS

METHOD OF FILLING GAP WITH FLOWABLE CARBON LAYER

METHODS OF FILLING RECESSES ON SUBSTRATE SURFACE, STRUCTURES FORMED...

METHOD OF FORMING A NITROGEN-CONTAINING CARBON FILM AND SYSTEM FOR...

METHOD OF FORMING A STRUCTURE INCLUDING CARBON MATERIAL, STRUCTURE...

METHOD OF FORMING HIGH ASPECT RATIO FEATURES