Hirotsugu Wada

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of evaluating shaped beam of charged beam writer and method...
- Patent number 5,843,603
- Issue date Dec 1, 1998
- Kabushiki Kaisha Toshiba
- Atsushi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure mask, method of manufacturing the same, and exposure metho...
- Patent number 5,358,808
- Issue date Oct 25, 1994
- Kabushiki Kaisha Toshiba
- Akihiro Nitayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure mask, method of manufacturing the same, and exposure metho...
- Patent number 5,234,780
- Issue date Aug 10, 1993
- Kabushiki Kaisha Toshiba
- Akihiro Nitayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY