Hiroyasu Goto

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Ibaragi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature regulation method and system for low flow rate liquid
- Patent number 7,896,254
- Issue date Mar 1, 2011
- SMC Corporation
- Hiroyasu Goto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus for detecting open circuits in parallel-wired thermo modules
- Patent number 6,111,513
- Issue date Aug 29, 2000
- SMC Corporation
- Hiroyasu Goto
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for and method of thermally processing substrate
- Patent number 6,080,969
- Issue date Jun 27, 2000
- SMC Corporation
- Hiroyasu Goto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE REGULATION METHOD AND SYSTEM FOR LOW FLOW RATE LIQUID
- Publication number 20090145489
- Publication date Jun 11, 2009
- SMC Corporation
- Hiroyasu Goto
- G05 - CONTROLLING REGULATING