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Hiroyasu Kawashima
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Turbo vacuum pump
Patent number
8,172,515
Issue date
May 8, 2012
Ebara Corporation
Hiroyasu Kawashima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Turbo vacuum pump and semiconductor manufacturing apparatus having...
Patent number
8,066,495
Issue date
Nov 29, 2011
Ebara Corporation
Shinichi Sekiguchi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Turbo vacuum pump and semiconductor manufacturing apparatus having...
Patent number
7,717,684
Issue date
May 18, 2010
Ebara Corporation
Shinichi Sekiguchi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Flowmeter having a float and a displacement sensor
Patent number
7,360,454
Issue date
Apr 22, 2008
Ebara Corporation
Hiroyasu Kawashima
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING...
Publication number
20100047096
Publication date
Feb 25, 2010
EBARA CORPORATION
Shinichi Sekiguchi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
TURBO VACUUM PUMP
Publication number
20090196734
Publication date
Aug 6, 2009
EBARA CORPORATION
Hiroyasu Kawashima
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
Flowmeter
Publication number
20060254368
Publication date
Nov 16, 2006
Hiroyasu Kawashima
G01 - MEASURING TESTING
Information
Patent Application
Turbo vacuum pump and semiconductor manufacturing apparatus having...
Publication number
20050042118
Publication date
Feb 24, 2005
EBARA CORPORATION
Shinichi Sekiguchi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...