Hiroyasu Kawashima

Person

  • Tokyo, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING...

    • Publication number 20100047096
    • Publication date Feb 25, 2010
    • EBARA CORPORATION
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    TURBO VACUUM PUMP

    • Publication number 20090196734
    • Publication date Aug 6, 2009
    • EBARA CORPORATION
    • Hiroyasu Kawashima
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Flowmeter

    • Publication number 20060254368
    • Publication date Nov 16, 2006
    • Hiroyasu Kawashima
    • G01 - MEASURING TESTING
  • Information Patent Application

    Turbo vacuum pump and semiconductor manufacturing apparatus having...

    • Publication number 20050042118
    • Publication date Feb 24, 2005
    • EBARA CORPORATION
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...