Hiroyasu SAITO

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum apparatus and charged particle beam writing apparatus
- Patent number 10,867,769
- Issue date Dec 15, 2020
- NuFlare Technology, Inc.
- Keita Ideno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber of charged particle beam drawing apparatus
- Patent number D759603
- Issue date Jun 21, 2016
- NuFlare Technology, Inc.
- Hiroyasu Saito
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Charged particle beam drawing apparatus and drawing chamber
- Patent number 9,196,458
- Issue date Nov 24, 2015
- NuFlare Technology, Inc.
- Hiroyasu Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and drawing chamber
- Patent number 9,165,747
- Issue date Oct 20, 2015
- NuFlare Technology, Inc.
- Hiroyasu Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber of charged particle beam drawing apparatus
- Patent number D722298
- Issue date Feb 10, 2015
- NuFlare Technology, Inc.
- Hiroyasu Saito
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Lithography apparatus and lithography method
- Patent number 8,653,477
- Issue date Feb 18, 2014
- Nuflare Technology, Inc.
- Hiroyasu Saito
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
VACUUM APPARATUS AND CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20190371567
- Publication date Dec 5, 2019
- NuFlare Technology, Inc.
- Keita IDENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS
- Publication number 20160203949
- Publication date Jul 14, 2016
- NuFlare Technology, Inc.
- Hiroyasu SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING CHAMBER
- Publication number 20150021495
- Publication date Jan 22, 2015
- NuFlare Technology, Inc.
- Hiroyasu SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS AND LITHOGRAPHY METHOD
- Publication number 20100238420
- Publication date Sep 23, 2010
- NuFlare Technology, Inc.
- Hiroyasu SAITO
- B82 - NANO-TECHNOLOGY