TREA

Hiroyuki AKAMA

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  • Oshu-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus
    • Patent number 11,390,948
    • Issue date Jul 19, 2022
    • Tokyo Electron Limited
    • Masato Yonezawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,385,453
    • Issue date Aug 20, 2019
    • Tokyo Electron Limited
    • Masato Yonezawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Film Forming Apparatus
    • Publication number 20190276935
    • Publication date Sep 12, 2019
    • TOKYO ELECTRON LIMITED
    • Masato YONEZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Apparatus
    • Publication number 20170051403
    • Publication date Feb 23, 2017
    • TOKYO ELECTRON LIMITED
    • Masato YONEZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...