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Hiroyuki ASAKAWA
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Nagano, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate fixing device, electrostatic chuck and electrostatic chuc...
Patent number
11,699,612
Issue date
Jul 11, 2023
Shinko Electric Industries Co., Ltd.
Keiichi Takemoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate fixing device
Patent number
11,631,598
Issue date
Apr 18, 2023
Shinko Electric Industries Co., Ltd.
Nobuyuki Iijima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE FIXING DEVICE, ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUC...
Publication number
20220157636
Publication date
May 19, 2022
Shinko Electric Industries Co., Ltd.
Keiichi Takemoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE FIXING DEVICE
Publication number
20200176282
Publication date
Jun 4, 2020
Shinko Electric Industries Co., Ltd.
Nobuyuki IIJIMA
H01 - BASIC ELECTRIC ELEMENTS