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Kurume, JP
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last 30 patents
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Patent Grant
Substrate transport and apparatus
Patent number
6,520,733
Issue date
Feb 18, 2003
Tokyo Electron Limited
Hiroki Taniyama
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate transport method and apparatus, and substrate processing...
Patent number
6,245,156
Issue date
Jun 12, 2001
Tokyo Electron Limited
Hiroki Taniyama
H01 - BASIC ELECTRIC ELEMENTS