Hiroyuki Eki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Operating valve, exposure apparatus, and device manufacturing method
- Patent number 8,319,947
- Issue date Nov 27, 2012
- Canon Kabushiki Kaisha
- Hiroyuki Eki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
OPERATING VALVE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20100091261
- Publication date Apr 15, 2010
- Canon Kabushiki Kaisha
- Hiroyuki Eki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY