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Hiroyuki Fujii
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Koshi-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Insulating film forming method, insulating film forming device, and...
Patent number
11,631,581
Issue date
Apr 18, 2023
Tokyo Electron Limited
Makoto Muramatsu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method and computer storage medium
Patent number
8,084,372
Issue date
Dec 27, 2011
Tokyo Electron Limited
Gen You
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240295821
Publication date
Sep 5, 2024
TOKYO ELECTRON LIMITED
Hiroyuki Fujii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM
Publication number
20230077937
Publication date
Mar 16, 2023
TOKYO ELECTRON LIMITED
Yusuke SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Insulating Film Forming Method, Insulating Film Forming Device, and...
Publication number
20200211838
Publication date
Jul 2, 2020
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
COATING SOLUTION SUPPLY APPARATUS
Publication number
20090183676
Publication date
Jul 23, 2009
TOKYO ELECTRON LIMITED
Hiroyuki FUJII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
Publication number
20090053904
Publication date
Feb 26, 2009
TOKYO ELECTRON LIMITED
Gen You
H01 - BASIC ELECTRIC ELEMENTS