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Hiroyuki Funamoto
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Tokyo, JP
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last 30 patents
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Patent Grant
Method of correcting defect of patterned article
Patent number
4,931,307
Issue date
Jun 5, 1990
Department of Electrical Engineering, Science University of Tokyo
Toshio Sugita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...