Hiroyuki Funamoto

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Method of correcting defect of patterned article

    • Patent number 4,931,307
    • Issue date Jun 5, 1990
    • Department of Electrical Engineering, Science University of Tokyo
    • Toshio Sugita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...