Hiroyuki ITO

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Patents Grantslast 30 patents

Information Patent Grant
Laser apparatus and extreme ultraviolet light generation system
- Patent number 11,586,032
- Issue date Feb 21, 2023
- Gigaphoton Inc.
- Hiroyuki Ito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20190293922
- Publication date Sep 26, 2019
- Gigaphoton Inc.
- Hiroyuki ITO
- H01 - BASIC ELECTRIC ELEMENTS