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Hiroyuki Itoh
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Utsunomiya, JP
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last 30 patents
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Patent Grant
Exposure apparatus and device manufacturing method
Patent number
6,088,080
Issue date
Jul 11, 2000
Canon Kabushiki Kaisha
Hiroyuki Itoh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
In-line processing system
Patent number
5,993,081
Issue date
Nov 30, 1999
Canon Kabushiki Kaisha
Hiroyuki Itoh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY