Hiroyuki Iwaki

Person

Nirasaki-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
System and method to calibrate a plurality of wafer inspection syst...
- Patent number 11,703,459
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for spin process video analysis during substrat...
- Patent number 11,637,031
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Baking device and baking method of baking a chemically amplified re...
- Patent number 7,402,782
- Issue date Jul 22, 2008
- Tokyo Electron Limited
- Hiroyuki Iwaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,401,988
- Issue date Jul 22, 2008
- Tokyo Electron Limited
- Takayuki Katano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,208,066
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Junichi Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 6,485,203
- Issue date Nov 26, 2002
- Tokyo Electron Limited
- Takayuki Katano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240248417
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Yoji SAKATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210129166
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210134637
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEM AND METHOD TO CALIBRATE A PLURALITY OF WAFER INSPECTION SYST...
- Publication number 20210131977
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070127916
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Junichi Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Heat treatment device and heat treatment method
- Publication number 20060096976
- Publication date May 11, 2006
- TOKYO ELECTRON LIMITED
- Hiroyuki Iwaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20040050321
- Publication date Mar 18, 2004
- TOKYO ELECTRON LIMITED
- Junichi Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20010013161
- Publication date Aug 16, 2001
- TOKYO ELECTRON LIMITED
- Junichi Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20010014372
- Publication date Aug 16, 2001
- TOKYO ELECTRON LIMITED
- Takayuki Katano
- H01 - BASIC ELECTRIC ELEMENTS

Hiroyuki Iwaki

Person

Patents Grantslast 30 patents

System and method to calibrate a plurality of wafer inspection syst...

Systems and methods for spin process video analysis during substrat...

Baking device and baking method of baking a chemically amplified re...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Systems and Methods for Spin Process Video Analysis During Substrat...

Systems and Methods for Spin Process Video Analysis During Substrat...

SYSTEM AND METHOD TO CALIBRATE A PLURALITY OF WAFER INSPECTION SYST...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Heat treatment device and heat treatment method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus