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Hiroyuki KAJIFUSA
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing method
Patent number
11,257,678
Issue date
Feb 22, 2022
HITACHI HIGH-TECH CORPORATION
Tomohiro Takamatsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210249233
Publication date
Aug 12, 2021
Hitachi High-Tech Corporation
Hiroyuki Kajifusa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING METHOD
Publication number
20200357650
Publication date
Nov 12, 2020
Hitachi High-Technologies Corporation
Tomohiro TAKAMATSU
H01 - BASIC ELECTRIC ELEMENTS