Hiroyuki KASHIWAGI

Person

Fujisawa-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint template manufacturing apparatus and imprint template manuf...
- Patent number 10,773,425
- Issue date Sep 15, 2020
- Shibaura Mechatronics Corporation
- Kensuke Demura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Imprint template treatment apparatus
- Patent number 10,668,496
- Issue date Jun 2, 2020
- Shibaura Mechatronics Corporation
- Satoshi Nakamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Template and pattern formation method
- Patent number 10,118,317
- Issue date Nov 6, 2018
- TOSHIBA MEMORY CORPORATION
- Yoshihisa Kawamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Pattern forming method
- Patent number 10,018,908
- Issue date Jul 10, 2018
- TOSHIBA MEMORY CORPORATION
- Naomi Shida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam irradiation device
- Patent number 9,960,007
- Issue date May 1, 2018
- TOSHIBA MEMORY CORPORATION
- Kazuto Matsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method
- Patent number 9,588,418
- Issue date Mar 7, 2017
- Kabushiki Kaisha Toshiba
- Naomi Shida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Near-field exposure mask, resist pattern forming method, device man...
- Patent number 9,550,322
- Issue date Jan 24, 2017
- Kabushiki Kaisha Toshiba
- Naomi Shida
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Near-field exposure mask, resist pattern forming method, device man...
- Patent number 9,029,047
- Issue date May 12, 2015
- Kabushiki Kaisha Toshiba
- Naomi Shida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Near-field exposure mask and pattern forming method
- Patent number 8,945,798
- Issue date Feb 3, 2015
- Kabushiki Kaisha Toshiba
- Naomi Shida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask inspection apparatus and mask inspection method
- Patent number 8,669,522
- Issue date Mar 11, 2014
- Kabushiki Kaisha Toshiba
- Shinji Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern forming method
- Patent number 8,419,950
- Issue date Apr 16, 2013
- Kabushiki Kaisha Toshiba
- Hiroyuki Kashiwagi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for inspecting nano-imprint template
- Patent number 8,294,889
- Issue date Oct 23, 2012
- Kabushiki Kaisha Toshiba
- Hiroyuki Kashiwagi
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...
- Publication number 20180117795
- Publication date May 3, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Kensuke Demura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...
- Publication number 20180117796
- Publication date May 3, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Kensuke Demura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPLATE FOR IMPRINT
- Publication number 20180022016
- Publication date Jan 25, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Satoshi NAKAMURA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS
- Publication number 20180016673
- Publication date Jan 18, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Satoshi NAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS
- Publication number 20180015497
- Publication date Jan 18, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Satoshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PATTERN FORMING METHOD
- Publication number 20170131630
- Publication date May 11, 2017
- Kabushiki Kaisha Toshiba
- Naomi SHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM IRRADIATION DEVICE
- Publication number 20170076907
- Publication date Mar 16, 2017
- Kabushiki Kaisha Toshiba
- Kazuto MATSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPLATE AND PATTERN FORMATION METHOD
- Publication number 20160346962
- Publication date Dec 1, 2016
- Kabushiki Kaisha Toshiba
- Yoshihisa KAWAMURA
- B82 - NANO-TECHNOLOGY
Information Patent Application
TEMPLATE, TEMPLATE FORMING METHOD, AND SEMICONDUCTOR DEVICE MANUFAC...
- Publication number 20160056036
- Publication date Feb 25, 2016
- Kabushiki Kaisha Toshiba
- Hiroshi TOKUE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
NEAR-FIELD EXPOSURE MASK, RESIST PATTERN FORMING METHOD, DEVICE MAN...
- Publication number 20150246478
- Publication date Sep 3, 2015
- Kabushiki Kaisha Toshiba
- Naomi Shida
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
NEAR-FIELD EXPOSURE MASK AND PATTERN FORMING METHOD
- Publication number 20150168825
- Publication date Jun 18, 2015
- Kabushiki Kaisha Toshiba
- Naomi Shida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEAR-FIELD EXPOSURE MASK AND PATTERN FORMING METHOD
- Publication number 20130260290
- Publication date Oct 3, 2013
- Kabushiki Kaisha Toshiba
- Naomi Shida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING APPARATUS
- Publication number 20130080991
- Publication date Mar 28, 2013
- Ryoichi Inanami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD
- Publication number 20120241645
- Publication date Sep 27, 2012
- Shinji YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
NEAR-FIELD EXPOSURE MASK, RESIST PATTERN FORMING METHOD, DEVICE MAN...
- Publication number 20120228804
- Publication date Sep 13, 2012
- Kabushiki Kaisha Toshiba
- Naomi Shida
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Pattern Forming Method
- Publication number 20110068081
- Publication date Mar 24, 2011
- Hiroyuki KASHIWAGI
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR INSPECTING NANO-IMPRINT TEMPLATE
- Publication number 20100315643
- Publication date Dec 16, 2010
- Hiroyuki KASHIWAGI
- G01 - MEASURING TESTING
Information Patent Application
TEMPLATE AND PATTERN FORMING METHOD
- Publication number 20100308513
- Publication date Dec 9, 2010
- Hiroyuki Kashiwagi
- B82 - NANO-TECHNOLOGY

Hiroyuki KASHIWAGI

Person

Patents Grantslast 30 patents

Imprint template manufacturing apparatus and imprint template manuf...

Imprint template treatment apparatus

Template and pattern formation method

Pattern forming method

Electron beam irradiation device

Pattern forming method

Near-field exposure mask, resist pattern forming method, device man...

Near-field exposure mask, resist pattern forming method, device man...

Near-field exposure mask and pattern forming method

Mask inspection apparatus and mask inspection method

Pattern forming method

Method for inspecting nano-imprint template

Patents Applicationslast 30 patents

IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...

IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...

TEMPLATE FOR IMPRINT

IMPRINT TEMPLATE MANUFACTURING APPARATUS

IMPRINT TEMPLATE MANUFACTURING APPARATUS

PATTERN FORMING METHOD

ELECTRON BEAM IRRADIATION DEVICE

TEMPLATE AND PATTERN FORMATION METHOD

TEMPLATE, TEMPLATE FORMING METHOD, AND SEMICONDUCTOR DEVICE MANUFAC...

NEAR-FIELD EXPOSURE MASK, RESIST PATTERN FORMING METHOD, DEVICE MAN...

NEAR-FIELD EXPOSURE MASK AND PATTERN FORMING METHOD

NEAR-FIELD EXPOSURE MASK AND PATTERN FORMING METHOD

PATTERN FORMING APPARATUS

MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD

NEAR-FIELD EXPOSURE MASK, RESIST PATTERN FORMING METHOD, DEVICE MAN...

Pattern Forming Method

METHOD FOR INSPECTING NANO-IMPRINT TEMPLATE

TEMPLATE AND PATTERN FORMING METHOD