Hiroyuki Kataoka

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Pallo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and apparatus
- Patent number 5,651,867
- Issue date Jul 29, 1997
- Hitachi, Ltd.
- Yuichi Kokaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...