Hiroyuki Kikuchi

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 12,051,566
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Hitoshi Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method, plasma processing apparatus, and control...
- Patent number 11,901,158
- Issue date Feb 13, 2024
- Tokyo Electron Limited
- Takeshi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rack bushing and steering device
- Patent number 11,878,740
- Issue date Jan 23, 2024
- Mazda Motor Corporation
- Gaku Ikeyama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Electronic component handling apparatus and electronic component te...
- Patent number 11,714,124
- Issue date Aug 1, 2023
- Advantest Corporation
- Hiromitsu Horino
- G01 - MEASURING TESTING
Information Patent Grant
Electronic component handling apparatus and electronic component te...
- Patent number 11,579,189
- Issue date Feb 14, 2023
- ADVANIEST Corporation
- Yoshinori Arai
- G01 - MEASURING TESTING
Information Patent Grant
Bearing and steering mechanism
- Patent number 11,548,546
- Issue date Jan 10, 2023
- Oiles Corporation
- Toshihiko Sekine
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Film forming method
- Patent number 11,495,457
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Jun Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rack bush and steering mechanism
- Patent number 11,254,347
- Issue date Feb 22, 2022
- Mazda Motor Corporation
- Gaku Ikeyama
- B62 - LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
Information Patent Grant
Heat insulating sheet, heat insulating material, and manufacturing...
- Patent number 11,230,087
- Issue date Jan 25, 2022
- Kaneka Corporation
- Kazuaki Matsumoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Rack guide and gear mechanism
- Patent number 11,091,190
- Issue date Aug 17, 2021
- Oiles Corporation
- Noboru Nakagawa
- B62 - LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
Information Patent Grant
Film forming method and recording medium
- Patent number 11,085,113
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 10,683,573
- Issue date Jun 16, 2020
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System, method, and recording medium storing program for authentica...
- Patent number 10,659,461
- Issue date May 19, 2020
- ISAO Corporation
- Toshiki Maezawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System, method, program, and recording medium storing program for a...
- Patent number 10,594,485
- Issue date Mar 17, 2020
- ISAO Corporation
- Toshiki Maezawa
- A63 - SPORTS GAMES AMUSEMENTS
Information Patent Grant
Film forming apparatus, film forming method, and recording medium
- Patent number 10,072,336
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus, film deposition method, and computer-rea...
- Patent number 9,932,674
- Issue date Apr 3, 2018
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for gap fill using deposition and etch processes
- Patent number 9,865,499
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,865,454
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of processing a substrate
- Patent number 9,711,370
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Shigehiro Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,601,318
- Issue date Mar 21, 2017
- Tokyo Electron Limited
- Shigehiro Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic component transfer shuttle
- Patent number 9,586,760
- Issue date Mar 7, 2017
- Advantest Corporation
- Haruki Nakajima
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Electronic device transfer apparatus, electronic device handling ap...
- Patent number 9,340,361
- Issue date May 17, 2016
- Advantest Corporation
- Haruki Nakajima
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Handler apparatus and test method
- Patent number 9,285,393
- Issue date Mar 15, 2016
- Advantest Corporation
- Hiroyuki Kikuchi
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor processing system including vaporizer and method for...
- Patent number 9,159,548
- Issue date Oct 13, 2015
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a film and film deposition apparatus
- Patent number 9,153,433
- Issue date Oct 6, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus
- Patent number 9,093,490
- Issue date Jul 28, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Activated gas injector, film deposition apparatus, and film deposit...
- Patent number 9,053,909
- Issue date Jun 9, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 8,992,685
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sliding bearing
- Patent number 8,944,689
- Issue date Feb 3, 2015
- Oiles Corporation
- Kenji Tange
- B62 - LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
Information Patent Grant
Film deposition method
- Patent number 8,932,963
- Issue date Jan 13, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240347351
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20240304416
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20230245858
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20230230817
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220230852
- Publication date Jul 21, 2022
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20220223375
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RACK BUSHING AND STEERING DEVICE
- Publication number 20220194461
- Publication date Jun 23, 2022
- MAZDA MOTOR CORPORATION
- Gaku IKEYAMA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
ELECTRONIC COMPONENT HANDLING APPARATUS AND ELECTRONIC COMPONENT TE...
- Publication number 20220026486
- Publication date Jan 27, 2022
- Advantest Corporation
- Hiromitsu Horino
- G01 - MEASURING TESTING
Information Patent Application
ELECTRONIC COMPONENT HANDLING APPARATUS AND ELECTRONIC COMPONENT TE...
- Publication number 20220026487
- Publication date Jan 27, 2022
- Advantest Corporation
- Yoshinori Arai
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS, AND CONTROL...
- Publication number 20210351010
- Publication date Nov 11, 2021
- TOKYO ELECTRON LIMITED
- Takeshi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20210351005
- Publication date Nov 11, 2021
- TOKYO ELECTRON LIMITED
- Takeshi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD
- Publication number 20210050208
- Publication date Feb 18, 2021
- TOKYO ELECTRON LIMITED
- Jun SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT INSULATING SHEET, HEAT INSULATING MATERIAL, AND MANUFACTURING...
- Publication number 20210001605
- Publication date Jan 7, 2021
- Kaneka Corporation
- Kazuaki Matsumoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
BEARING AND STEERING MECHANISM
- Publication number 20200346681
- Publication date Nov 5, 2020
- OILES CORPORATION
- Toshihiko SEKINE
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
RACK GUIDE AND GEAR MECHANISM
- Publication number 20200283055
- Publication date Sep 10, 2020
- OILES CORPORATION
- Noboru NAKAGAWA
- B62 - LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
Information Patent Application
SYSTEM, METHOD, PROGRAM, AND RECORDING MEDIUM STORING PROGRAM FOR A...
- Publication number 20190222420
- Publication date Jul 18, 2019
- ISAO Corporation
- Toshiki MAEZAWA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SYSTEM, METHOD, AND RECORDING MEDIUM STORING PROGRAM FOR AUTHENTICA...
- Publication number 20190207938
- Publication date Jul 4, 2019
- ISAO CORPORATION
- Toshiki Maezawa
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Film Forming Apparatus, Film Forming Method, and Recording Medium
- Publication number 20180327906
- Publication date Nov 15, 2018
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RACK GUIDE AND RACK-AND-PINION TYPE STEERING APPARATUS HAVING THE R...
- Publication number 20170037952
- Publication date Feb 9, 2017
- OILES CORPORATION
- Hiroyuki KIKUCHI
- B62 - LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITING A SILICON-CONTAINING FILM
- Publication number 20160379868
- Publication date Dec 29, 2016
- TOKYO ELECTRON LIMITED
- Jun SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20160138159
- Publication date May 19, 2016
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND RECORDING MEDIUM
- Publication number 20160122872
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE
- Publication number 20160064246
- Publication date Mar 3, 2016
- TOKYO ELECTRON LIMITED
- Shigehiro MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150332895
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Shigehiro MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC COMPONENT TRANSFER SHUTTLE
- Publication number 20150203300
- Publication date Jul 23, 2015
- Advantest Corporation
- Haruki NAKAJIMA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
- Publication number 20150184294
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HANDLER APPARATUS AND TEST METHOD
- Publication number 20150137844
- Publication date May 21, 2015
- Advantest Corporation
- Hiroyuki KIKUCHI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150126044
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20140370205
- Publication date Dec 18, 2014
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A FILM AND FILM DEPOSITION APPARATUS
- Publication number 20140113436
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hiroyuki Kikuchi

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Plasma processing method, plasma processing apparatus, and control...

Rack bushing and steering device

Electronic component handling apparatus and electronic component te...

Electronic component handling apparatus and electronic component te...

Bearing and steering mechanism

Film forming method

Rack bush and steering mechanism

Heat insulating sheet, heat insulating material, and manufacturing...

Rack guide and gear mechanism

Film forming method and recording medium

Film forming apparatus

System, method, and recording medium storing program for authentica...

System, method, program, and recording medium storing program for a...

Film forming apparatus, film forming method, and recording medium

Film deposition apparatus, film deposition method, and computer-rea...

Method and apparatus for gap fill using deposition and etch processes

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and method of processing a substrate

Plasma processing method and plasma processing apparatus

Electronic component transfer shuttle

Electronic device transfer apparatus, electronic device handling ap...

Handler apparatus and test method

Semiconductor processing system including vaporizer and method for...

Method of depositing a film and film deposition apparatus

Film deposition apparatus

Activated gas injector, film deposition apparatus, and film deposit...

Substrate processing apparatus, substrate processing method, and co...

Sliding bearing

Film deposition method

Patents Applicationslast 30 patents

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

ANTENNA AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

DEPOSITION METHOD AND DEPOSITION APPARATUS

PLASMA PROCESSING APPARATUS

ANTENNA AND PLASMA PROCESSING APPARATUS

RACK BUSHING AND STEERING DEVICE

ELECTRONIC COMPONENT HANDLING APPARATUS AND ELECTRONIC COMPONENT TE...

ELECTRONIC COMPONENT HANDLING APPARATUS AND ELECTRONIC COMPONENT TE...

PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS, AND CONTROL...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

FILM FORMING METHOD

HEAT INSULATING SHEET, HEAT INSULATING MATERIAL, AND MANUFACTURING...

BEARING AND STEERING MECHANISM

RACK GUIDE AND GEAR MECHANISM

SYSTEM, METHOD, PROGRAM, AND RECORDING MEDIUM STORING PROGRAM FOR A...

SYSTEM, METHOD, AND RECORDING MEDIUM STORING PROGRAM FOR AUTHENTICA...

Film Forming Apparatus, Film Forming Method, and Recording Medium

RACK GUIDE AND RACK-AND-PINION TYPE STEERING APPARATUS HAVING THE R...

METHOD AND APPARATUS FOR DEPOSITING A SILICON-CONTAINING FILM

FILM FORMING APPARATUS

FILM FORMING APPARATUS, FILM FORMING METHOD, AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

ELECTRONIC COMPONENT TRANSFER SHUTTLE

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...

HANDLER APPARATUS AND TEST METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM DEPOSITION METHOD

METHOD OF DEPOSITING A FILM AND FILM DEPOSITION APPARATUS