Hiroyuki Kobayashi

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Nagano-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic adsorption member and substrate fixing device
- Patent number 11,881,794
- Issue date Jan 23, 2024
- Shinko Electric Industries Co., Ltd.
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate fixing device
- Patent number 11,869,793
- Issue date Jan 9, 2024
- Shinko Electric Industries Co., Ltd.
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate fixing device
- Patent number 11,545,384
- Issue date Jan 3, 2023
- Shinko Electric Industries Co., Ltd.
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC ADSORPTION MEMBER AND SUBSTRATE FIXING DEVICE
- Publication number 20220345054
- Publication date Oct 27, 2022
- Shinko Electric Industries Co., Ltd.
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
- Publication number 20210242065
- Publication date Aug 5, 2021
- Shinko Electric Industries Co., Ltd.
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
- Publication number 20210242066
- Publication date Aug 5, 2021
- Shinko Electric Industries Co., Ltd.
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK MEMBER, METHOD OF MANUFACTURING THE SAME, AND E...
- Publication number 20090056112
- Publication date Mar 5, 2009
- Shinko Electric Industries Co., Ltd.
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS