Hiroyuki Kudoh

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Koshi-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method for processing substrate, an...
- Patent number 8,992,687
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical solution vaporizing tank and chemical solution treating sy...
- Patent number 8,858,710
- Issue date Oct 14, 2014
- Tokyo Electron Limited
- Kouichi Mizunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, storage medium storing program for exe...
- Patent number 8,393,227
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Norihiro Itoh
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AN...
- Publication number 20110308464
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING PROGRAM FOR EXE...
- Publication number 20110209560
- Publication date Sep 1, 2011
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AN...
- Publication number 20090029046
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical solution vaporizing tank and chemical solution treating sy...
- Publication number 20090020072
- Publication date Jan 22, 2009
- TOKYO ELECTRON LIMITED
- Kouichi Mizunaga
- H01 - BASIC ELECTRIC ELEMENTS