Hiroyuki Kudou

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Nishikoshimachi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,656,281
- Issue date Dec 2, 2003
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number RE37470
- Issue date Dec 18, 2001
- Tokyo Electron Limited
- Jun Ohkura
- 396 - Photography
Information Patent Grant
Substrate processing system
- Patent number 6,309,116
- Issue date Oct 30, 2001
- Tokyo Electron Limited
- Koji Mahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for wet etching of thin film
- Patent number 6,096,233
- Issue date Aug 1, 2000
- Tokyo Electron Limited
- Hiroki Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for target processing substrate
- Patent number 5,975,097
- Issue date Nov 2, 1999
- Tokyo Electron Limited
- Akira Yonemizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus
- Patent number 5,711,646
- Issue date Jan 27, 1998
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 5,664,254
- Issue date Sep 2, 1997
- Tokyo Electron Limited
- Jun Ohkura
- H01 - BASIC ELECTRIC ELEMENTS