Hiroyuki MAKINO

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,105,451
- Issue date Aug 11, 2015
- Sumitomo Heavy Industries, Ltd.
- Hiroyuki Makino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,366,833
- Issue date Feb 5, 2013
- Sumitomo Heavy Industries
- Hiroyuki Makino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition method for forming copper film
- Patent number 6,220,204
- Issue date Apr 24, 2001
- Sumitomo Heavy Industries, Ltd.
- Hiroyuki Makino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20120181252
- Publication date Jul 19, 2012
- Sumitomo Heavy Industries, Ltd.
- Hiroyuki MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20110097516
- Publication date Apr 28, 2011
- Sumitomo Heavy Industries, Ltd.
- Hiroyuki MAKINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20110097510
- Publication date Apr 28, 2011
- Sumitomo Heavy Industries, Ltd.
- Hiroyuki MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-layer circuit board and method for manufacturing same
- Publication number 20040148766
- Publication date Aug 5, 2004
- Jinichi Noguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR