Hiroyuki Maruyama

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 7,671,964
- Issue date Mar 2, 2010
- Canon Kabushiki Kaisha
- Chiharu Kido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,652,748
- Issue date Jan 26, 2010
- Canon Kabushiki Kaisha
- Chiharu Kido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Patent number 7,460,213
- Issue date Dec 2, 2008
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Patent number 7,298,457
- Issue date Nov 20, 2007
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Refrigerant supply apparatus
- Patent number 7,201,016
- Issue date Apr 10, 2007
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromagnetic actuator and exposure apparatus having the same
- Patent number 6,762,516
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
CLEANING APPARATUS, IMPRINT APPARATUS, CLEANING METHOD, AND ARTICLE...
- Publication number 20250205758
- Publication date Jun 26, 2025
- Canon Kabushiki Kaisha
- HIROYUKI MARUYAMA
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS, CLEANING METHOD, IMPRINT APPARATUS, AND METHOD...
- Publication number 20240091825
- Publication date Mar 21, 2024
- Canon Kabushiki Kaisha
- HIROYUKI MARUYAMA
- B08 - CLEANING
Information Patent Application
ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING M...
- Publication number 20090066928
- Publication date Mar 12, 2009
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus and Device Manufacturing Method
- Publication number 20080246930
- Publication date Oct 9, 2008
- Canon Kabushiki Kaisha
- Chiharu Kido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING M...
- Publication number 20080079953
- Publication date Apr 3, 2008
- Hiroyuki Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Refrigerant supply apparatus
- Publication number 20060248919
- Publication date Nov 9, 2006
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, and device manufacturing method
- Publication number 20060209275
- Publication date Sep 21, 2006
- Canon Kabushiki Kaisha
- Chiharu Kido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Publication number 20060176465
- Publication date Aug 10, 2006
- Hiroyuki Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Refrigerant supply apparatus
- Publication number 20040162008
- Publication date Aug 19, 2004
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device manufacturing apparatus
- Publication number 20040072434
- Publication date Apr 15, 2004
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electromagnetic actuator and exposure apparatus having the same
- Publication number 20020140298
- Publication date Oct 3, 2002
- Canon Kabushiki Kaisha
- Hiroyuki Maruyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hiroyuki Maruyama

Person

Patents Grantslast 30 patents

Exposure apparatus, and device manufacturing method

Exposure apparatus and device manufacturing method

Alignment apparatus, exposure apparatus, and device manufacturing m...

Alignment apparatus, exposure apparatus, and device manufacturing m...

Refrigerant supply apparatus

Electromagnetic actuator and exposure apparatus having the same

Patents Applicationslast 30 patents

CLEANING APPARATUS, IMPRINT APPARATUS, CLEANING METHOD, AND ARTICLE...

CLEANING APPARATUS, CLEANING METHOD, IMPRINT APPARATUS, AND METHOD...

ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING M...

Exposure Apparatus and Device Manufacturing Method

ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING M...

Refrigerant supply apparatus

Exposure apparatus, and device manufacturing method

Alignment apparatus, exposure apparatus, and device manufacturing m...

Refrigerant supply apparatus

Device manufacturing apparatus

Electromagnetic actuator and exposure apparatus having the same