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Hiroyuki Masutomi
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Kumamoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,972,958
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid processing apparatus
Patent number
11,637,026
Issue date
Apr 25, 2023
Tokyo Electron Limited
Hiroyuki Masutomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
Patent number
11,594,430
Issue date
Feb 28, 2023
Tokyo Electron Limited
Takafumi Tsuchiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid treatment apparatus
Patent number
11,309,194
Issue date
Apr 19, 2022
Tokyo Electron Limited
Koji Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
Patent number
10,483,137
Issue date
Nov 19, 2019
Tokyo Electron Limited
Hiroyuki Masutomi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210358773
Publication date
Nov 18, 2021
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20190148176
Publication date
May 16, 2019
TOKYO ELECTRON LIMITED
Koji Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
Publication number
20190103294
Publication date
Apr 4, 2019
TOKYO ELECTRON LIMITED
Hiroyuki Masutomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
Publication number
20190080937
Publication date
Mar 14, 2019
TOKYO ELECTRON LIMITED
Takafumi Tsuchiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS
Publication number
20180218924
Publication date
Aug 2, 2018
TOKYO ELECTRON LIMITED
Koji TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
Publication number
20180025927
Publication date
Jan 25, 2018
TOKYO ELECTRON LIMITED
Hiroyuki Masutomi
H01 - BASIC ELECTRIC ELEMENTS