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Hiroyuki Matsui
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Hitachinaka, JP
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last 30 patents
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Patent Grant
Charged particle beam apparatus for removing charges developed on a...
Patent number
9,202,665
Issue date
Dec 1, 2015
Hitachi High-Technologies Corporation
Hiroyuki Matsui
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20140027635
Publication date
Jan 30, 2014
Hiroyuki Matsui
H01 - BASIC ELECTRIC ELEMENTS