Hiroyuki Matsukawa

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of substrate processing to form a film on multiple target ob...
- Patent number 6,054,181
- Issue date Apr 25, 2000
- Tokyo Electron Limited
- Mitsuhiro Nanbu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Double-sided substrate cleaning apparatus and cleaning method using...
- Patent number 5,964,954
- Issue date Oct 12, 1999
- Tokyo Electron Limited
- Hiroyuki Matsukawa
- B08 - CLEANING
Information Patent Grant
Semiconductor wafer processing apparatus including localized humidi...
- Patent number 5,725,664
- Issue date Mar 10, 1998
- Tokyo Electron Limited
- Mitsuhiro Nanbu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist treating method
- Patent number 5,686,143
- Issue date Nov 11, 1997
- Tokyo Electron Limited
- Hiroyuki Matsukawa
- B08 - CLEANING
Information Patent Grant
Apparatus for processing substrates having a film formed on a surfa...
- Patent number 5,565,034
- Issue date Oct 15, 1996
- Tokyo Electron Limited
- Mitsuhiro Nanbu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Double-sided substrate cleaning apparatus
- Patent number 5,518,542
- Issue date May 21, 1996
- Tokyo Electron Limited
- Hiroyuki Matsukawa
- B08 - CLEANING