HIROYUKI MIYAMOTO

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KIKUCHI-GUN, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for changing concentration of treatment solution and trea...
- Patent number 7,323,063
- Issue date Jan 29, 2008
- Tokyo Electron Limited
- Takahiro Okubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid supply mechanism and process liquid supply method
- Patent number 6,848,625
- Issue date Feb 1, 2005
- Tokyo Electron Limited
- Takashi Takekuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for forming coating film and apparatus for curing the coa...
- Patent number 6,673,155
- Issue date Jan 6, 2004
- Tokyo Electron Limited
- Shinji Nagashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CHANGING CONCENTRATION OF TREATMENT SOLUTION AND TREATME...
- Publication number 20080063786
- Publication date Mar 13, 2008
- TOKYO ELECTRON LIMITED
- Takahiro Okubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR FORMING COATING FILM AND APPARATUS FOR CURING THE COA...
- Publication number 20030200918
- Publication date Oct 30, 2003
- SHINJI NAGASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process liquid supply mechanism and process liquid supply method
- Publication number 20030180471
- Publication date Sep 25, 2003
- TOKYO ELECTRON LIMITED
- Takashi Takekuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for changing concentration of treatment solution and treatme...
- Publication number 20020164414
- Publication date Nov 7, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Okubo
- H01 - BASIC ELECTRIC ELEMENTS