Hiroyuki Nagahama

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Displacement measuring apparatus, electron beam inspection apparatu...
- Patent number 10,655,956
- Issue date May 19, 2020
- NuFlare Technology, Inc.
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Grant
Illumination apparatus and inspection apparatus
- Patent number 9,423,356
- Issue date Aug 23, 2016
- NuFlare Technology, Inc.
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Grant
Focal position adjustment method and inspection method
- Patent number 9,213,001
- Issue date Dec 15, 2015
- NuFlare Technology, Inc.
- Hiroyuki Nagahama
- G01 - MEASURING TESTING
Information Patent Grant
Luminous flux branching element and mask defect inspection apparatus
- Patent number 8,767,200
- Issue date Jul 1, 2014
- Nuflare Technology, Inc.
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Grant
Light amount measurement device and light amount measurement method
- Patent number 7,388,660
- Issue date Jun 17, 2008
- Advanced Mask Inspection Technology Inc.
- Noboru Kobayashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DISPLACEMENT MEASUREMENT DEVICE AND DISPLACEMENT MEASUREMENT METHOD
- Publication number 20190361124
- Publication date Nov 28, 2019
- NuFlare Technology, Inc.
- Riki OGAWA
- G01 - MEASURING TESTING
Information Patent Application
DISPLACEMENT MEASURING APPARATUS, ELECTRON BEAM INSPECTION APPARATU...
- Publication number 20190195621
- Publication date Jun 27, 2019
- NuFlare Technology, Inc.
- Riki OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCAL POSITION ADJUSTMENT METHOD AND INSPECTION METHOD
- Publication number 20150204796
- Publication date Jul 23, 2015
- NuFlare Technology, Inc.
- Hiroyuki NAGAHAMA
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION APPARATUS AND INSPECTION APPARATUS
- Publication number 20140300893
- Publication date Oct 9, 2014
- KABUSHIKI KAISHA TOSHIBA
- Riki OGAWA
- G02 - OPTICS
Information Patent Application
LUMINOUS FLUX BRANCHING ELEMENT AND MASK DEFECT INSPECTION APPARATUS
- Publication number 20130176559
- Publication date Jul 11, 2013
- NuFlare Technology, Inc.
- Riki OGAWA
- G02 - OPTICS
Information Patent Application
Light amount measurement device and light amount measurement method
- Publication number 20070081149
- Publication date Apr 12, 2007
- Advanced Mask Inspection Technology Inc.
- Noboru Kobayashi
- G01 - MEASURING TESTING