Hiroyuki Nakayama

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection apparatus and inspection method
- Patent number 11,940,485
- Issue date Mar 26, 2024
- Tokyo Electron Limited
- Naoki Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus and inspection method
- Patent number 11,927,539
- Issue date Mar 12, 2024
- Tokyo Electron Limited
- Naoki Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and control method for inspection apparatus
- Patent number 11,874,319
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Hiroyuki Nakayama
- G01 - MEASURING TESTING
Information Patent Grant
Substrate support, test device, and method of adjusting temperature...
- Patent number 11,810,800
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Hiroyuki Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dummy wafer
- Patent number 11,776,829
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus, control method, and storage medium
- Patent number 11,719,744
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Hiroyuki Nakayama
- G01 - MEASURING TESTING
Information Patent Grant
Control method of inspection apparatus and inspection apparatus
- Patent number 11,668,747
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Naoki Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Substrate support and inspection apparatus
- Patent number 11,557,494
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Masahito Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 11,543,445
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 11,536,768
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Hiroyuki Nakayama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and inspection method
- Patent number 11,525,856
- Issue date Dec 13, 2022
- Tokyo Electron Limited
- Naoki Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method in inspection apparatus, and the inspection apparatus
- Patent number 11,515,141
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Hiroyuki Nakayama
- B08 - CLEANING
Information Patent Grant
Stage and inspection apparatus for inspecting electronic device
- Patent number 11,499,993
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Dai Kobayashi
- G01 - MEASURING TESTING
Information Patent Grant
Transfer chamber and method for preventing adhesion of particle
- Patent number 10,115,614
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method of processing apparatus, program for performing the...
- Patent number 9,627,184
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chamber and method for preventing adhesion of particle
- Patent number 9,385,015
- Issue date Jul 5, 2016
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 8,877,002
- Issue date Nov 4, 2014
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum apparatus including a particle monitoring unit, particle mon...
- Patent number 8,854,625
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Tsuyoshi Moriya
- B08 - CLEANING
Information Patent Grant
Particle distribution analysis method for computer readable storage...
- Patent number 8,768,644
- Issue date Jul 1, 2014
- Tokyo Electron Limited
- Kunio Miyauchi
- G01 - MEASURING TESTING
Information Patent Grant
Plasma treatment container internal member, and plasma treatment ap...
- Patent number 8,739,732
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 8,449,715
- Issue date May 28, 2013
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method, and storage medium
- Patent number 8,440,050
- Issue date May 14, 2013
- Tokyo Electron Limited
- Manabu Iwata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 8,409,328
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method
- Patent number 8,404,050
- Issue date Mar 26, 2013
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and exhaust method therefor
- Patent number 8,398,745
- Issue date Mar 19, 2013
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate valve cleaning method and substrate processing system
- Patent number 8,382,938
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of presuming interior situation of process chamber and stora...
- Patent number 8,364,422
- Issue date Jan 29, 2013
- Tokyo Electron Limited
- Hiroyuki Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning elements in vacuum chamber and apparatus for pr...
- Patent number 8,337,629
- Issue date Dec 25, 2012
- Tokyo Electron Limited
- Tsuyoshi Moriya
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus and plasma etching method
- Patent number 8,303,834
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and computer readable storage medium
- Patent number 8,241,514
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Inspection Method
- Publication number 20250112096
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Testing Apparatus and Testing Method
- Publication number 20250076215
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- G01 - MEASURING TESTING
Information Patent Application
Inspection Apparatus and Mounting Base
- Publication number 20250076232
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
LED CHUCK
- Publication number 20240159825
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Tomoki NUKANOBU
- G01 - MEASURING TESTING
Information Patent Application
TEST DEVICE AND TEMPERATURE CONTROL METHOD
- Publication number 20240125843
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM
- Publication number 20220229105
- Publication date Jul 21, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- G01 - MEASURING TESTING
Information Patent Application
CONTROL METHOD OF INSPECTION APPARATUS AND INSPECTION APPARATUS
- Publication number 20220043055
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Naoki AKIYAMA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20220018898
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS AND CONTROL METHOD FOR INSPECTION APPARATUS
- Publication number 20220018889
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CONTROLLING TEMPERATURE OF SUBSTRATE SUPPORT AND INSPECT...
- Publication number 20220015193
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE SUPPORT AND INSPECTION APPARATUS
- Publication number 20210407829
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Masahito KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
- Publication number 20210389366
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Naoki AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
- Publication number 20210382105
- Publication date Dec 9, 2021
- TOKYO ELECTRON LIMITED
- Naoki AKIYAMA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
- Publication number 20210356405
- Publication date Nov 18, 2021
- TOKYO ELECTRON LIMITED
- Naoki AKIYAMA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT, TEST DEVICE, AND METHOD OF ADJUSTING TEMPERATURE...
- Publication number 20210296145
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUMMY WAFER
- Publication number 20210265183
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- B32 - LAYERED PRODUCTS
Information Patent Application
STAGE AND INSPECTION APPARATUS
- Publication number 20210156891
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Dai KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
STAGE AND INSPECTION APPARATUS
- Publication number 20210156890
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Dai KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20200386805
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- G01 - MEASURING TESTING
Information Patent Application
CLEANING METHOD IN INSPECTION APPARATUS, AND THE INSPECTION APPARATUS
- Publication number 20200286728
- Publication date Sep 10, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBER AND METHOD FOR PREVENTING ADHESION OF PARTICLE
- Publication number 20160315001
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT DEVICE AND TEMPLATE
- Publication number 20150158242
- Publication date Jun 11, 2015
- TOKYO ELECTRON LIMITED
- Kenya Iwasaki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL
- Publication number 20130255881
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Kouji MITSUHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20120285623
- Publication date Nov 15, 2012
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING ELEMENTS IN VACUUM CHAMBER AND APPARATUS FOR PR...
- Publication number 20120247502
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- B08 - CLEANING
Information Patent Application
PARTICLE DISTRIBUTION ANALYSIS METHOD FOR COMPUTER READABLE STORAGE...
- Publication number 20120029863
- Publication date Feb 2, 2012
- TOKYO ELECTRON LIMITED
- Kunio Miyauchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GATE VALVE CLEANING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20120012254
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD OF PROCESSING APPARATUS, PROGRAM FOR PERFORMING THE...
- Publication number 20110126853
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM APPARATUS INCLUDING A PARTICLE MONITORING UNIT, PARTICLE MON...
- Publication number 20110094680
- Publication date Apr 28, 2011
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- B08 - CLEANING
Information Patent Application
INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL
- Publication number 20100307687
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hiroyuki Nakayama

Person

Patents Grantslast 30 patents

Inspection apparatus and inspection method

Inspection apparatus and inspection method

Inspection apparatus and control method for inspection apparatus

Substrate support, test device, and method of adjusting temperature...

Dummy wafer

Inspection apparatus, control method, and storage medium

Control method of inspection apparatus and inspection apparatus

Substrate support and inspection apparatus

Inspection apparatus

Inspection apparatus

Inspection apparatus and inspection method

Cleaning method in inspection apparatus, and the inspection apparatus

Stage and inspection apparatus for inspecting electronic device

Transfer chamber and method for preventing adhesion of particle

Cleaning method of processing apparatus, program for performing the...

Transfer chamber and method for preventing adhesion of particle

Internal member of a plasma processing vessel

Vacuum apparatus including a particle monitoring unit, particle mon...

Particle distribution analysis method for computer readable storage...

Plasma treatment container internal member, and plasma treatment ap...

Internal member of a plasma processing vessel

Plasma processing apparatus and method, and storage medium

Substrate transfer device and substrate transfer method

Plasma processing apparatus and method

Substrate processing apparatus and exhaust method therefor

Gate valve cleaning method and substrate processing system

Method of presuming interior situation of process chamber and stora...

Method for cleaning elements in vacuum chamber and apparatus for pr...

Plasma processing apparatus and plasma etching method

Plasma etching method and computer readable storage medium

Patents Applicationslast 30 patents

Inspection Method

Testing Apparatus and Testing Method

Inspection Apparatus and Mounting Base

LED CHUCK

TEST DEVICE AND TEMPERATURE CONTROL METHOD

INSPECTION APPARATUS, CONTROL METHOD, AND STORAGE MEDIUM

CONTROL METHOD OF INSPECTION APPARATUS AND INSPECTION APPARATUS

INSPECTION APPARATUS

INSPECTION APPARATUS AND CONTROL METHOD FOR INSPECTION APPARATUS

METHOD FOR CONTROLLING TEMPERATURE OF SUBSTRATE SUPPORT AND INSPECT...

SUBSTRATE SUPPORT AND INSPECTION APPARATUS

INSPECTION APPARATUS AND INSPECTION METHOD

INSPECTION APPARATUS AND INSPECTION METHOD

INSPECTION APPARATUS AND INSPECTION METHOD

SUBSTRATE SUPPORT, TEST DEVICE, AND METHOD OF ADJUSTING TEMPERATURE...

DUMMY WAFER

STAGE AND INSPECTION APPARATUS

STAGE AND INSPECTION APPARATUS

INSPECTION DEVICE

CLEANING METHOD IN INSPECTION APPARATUS, AND THE INSPECTION APPARATUS

TRANSFER CHAMBER AND METHOD FOR PREVENTING ADHESION OF PARTICLE

IMPRINT DEVICE AND TEMPLATE

INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL

PLASMA PROCESSING APPARATUS AND METHOD

METHOD FOR CLEANING ELEMENTS IN VACUUM CHAMBER AND APPARATUS FOR PR...

PARTICLE DISTRIBUTION ANALYSIS METHOD FOR COMPUTER READABLE STORAGE...

GATE VALVE CLEANING METHOD AND SUBSTRATE PROCESSING SYSTEM

CLEANING METHOD OF PROCESSING APPARATUS, PROGRAM FOR PERFORMING THE...

VACUUM APPARATUS INCLUDING A PARTICLE MONITORING UNIT, PARTICLE MON...

INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL