Hiroyuki Shida

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Koganei, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply apparatus and film forming apparatus
- Patent number 6,224,676
- Issue date May 1, 2001
- Hitachi, Ltd.
- Katsunori Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing device and film forming device and method using same
- Patent number 5,815,396
- Issue date Sep 29, 1998
- Hitachi, Ltd.
- Hideaki Shimamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing equipment, film coating equipment and deposition...
- Patent number 5,707,500
- Issue date Jan 13, 1998
- Hitachi, Ltd.
- Hideaki Shimamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...