Hiroyuki SHIGEMURA

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of inspecting mask pattern and mask pattern inspection appar...
- Patent number 8,488,866
- Issue date Jul 16, 2013
- Renesas Electronics Corporation
- Tsuneo Terasawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Reflective mask blank, reflective mask, method of inspecting reflec...
- Patent number 7,947,415
- Issue date May 24, 2011
- Dai Nippon Printing Co., Ltd.
- Tsuyoshi Amano
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF INSPECTING MASK PATTERN AND MASK PATTERN INSPECTION APPAR...
- Publication number 20100208978
- Publication date Aug 19, 2010
- NEC ELECTRONICS CORPORAITON
- Tsuneo TERASAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF INSPECTING REFLEC...
- Publication number 20090233188
- Publication date Sep 17, 2009
- Tsuyoshi Amano
- B82 - NANO-TECHNOLOGY