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Hiroyuki Shinoda
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Choufu, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of inspecting a pattern on a substrate
Patent number
6,376,854
Issue date
Apr 23, 2002
Hitachi, Ltd.
Chie Shishido
G01 - MEASURING TESTING
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Patent Grant
Method of inspecting pattern and apparatus thereof with a different...
Patent number
6,236,057
Issue date
May 22, 2001
Hitachi, Ltd.
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Grant
Method of inspecting pattern and apparatus thereof
Patent number
6,087,673
Issue date
Jul 11, 2000
Hitachi, Ltd.
Chie Shishido
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method of inspecting pattern and apparatus thereof
Publication number
20010030300
Publication date
Oct 18, 2001
Chie Shishido
G01 - MEASURING TESTING