Hiroyuki Sonoda

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Patents Grantslast 30 patents

Information Patent Grant
Method of removing polymer and apparatus for doing the same
- Patent number 7,064,079
- Issue date Jun 20, 2006
- NEC Electronics Corporation
- Hiroyuki Sonoda
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Method of removing polymer and apparatus for doing the same
- Publication number 20040009669
- Publication date Jan 15, 2004
- NEC ELECTRONICS CORPORATION
- Hiroyuki Sonoda
- B08 - CLEANING