Hiroyuki Suzuki

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Radiation of substrates during processing and systems thereof
- Patent number 11,289,325
- Issue date Mar 29, 2022
- Tokyo Electron Limited
- Michael Edley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 11,069,520
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,748,790
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,192,758
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 9,805,957
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 9,321,085
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Teruomi Minami
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Radiation of Substrates During Processing and Systems Thereof
- Publication number 20220189764
- Publication date Jun 16, 2022
- TOKYO ELECTRON LIMITED
- Michael Edley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radiation of Substrates During Processing and Systems Thereof
- Publication number 20210407790
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Michael Edley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20190043739
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Hiroyuki SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180254199
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Hiroyuki SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180012781
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD OF PROCESSING CH...
- Publication number 20170084470
- Publication date Mar 23, 2017
- TOKYO ELECTRON LIMITED
- Hiroyuki Suzuki
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20140360536
- Publication date Dec 11, 2014
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20130133695
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- B08 - CLEANING

Hiroyuki Suzuki

Person

Patents Grantslast 30 patents

Radiation of substrates during processing and systems thereof

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus, substrate processing method and com...

Substrate processing method, storage medium storing computer progra...

Patents Applicationslast 30 patents

Radiation of Substrates During Processing and Systems Thereof

Radiation of Substrates During Processing and Systems Thereof

SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD OF PROCESSING CH...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...