Hiroyuki Takaba

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Portland, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of depositing dielectric films using microwave plasma
- Patent number 8,962,454
- Issue date Feb 24, 2015
- Tokyo Electron Limited
- Hiroyuki Takaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning plasma-treating apparatus, plasma-treating appar...
- Patent number 8,419,859
- Issue date Apr 16, 2013
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DEPOSITING DIELECTRIC FILMS USING MICROWAVE PLASMA
- Publication number 20120115334
- Publication date May 10, 2012
- Hiroyuki Takaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING PLASMA-TREATING APPARATUS, PLASMA-TREATING APPAR...
- Publication number 20100175713
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...