Hiroyuki Takenaka

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and control method
- Patent number 11,260,493
- Issue date Mar 1, 2022
- Ebara Corporation
- Minoru Harada
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 10,354,900
- Issue date Jul 16, 2019
- Ebara Corporation
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus for detecting abnormality in polishing of a sub...
- Patent number 10,343,252
- Issue date Jul 9, 2019
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for detecting abnormality in polishing of a substrate
- Patent number 9,782,869
- Issue date Oct 10, 2017
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method of detecting abnormality in polishing of a substrate and pol...
- Patent number 9,248,543
- Issue date Feb 2, 2016
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
LOAD ADJUSTING SYSTEM AND LOAD ADJUSTING METHOD
- Publication number 20250010429
- Publication date Jan 9, 2025
- EBARA CORPORATION
- Hiroyuki TAKENAKA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD
- Publication number 20190217438
- Publication date Jul 18, 2019
- EBARA CORPORATION
- Minoru Harada
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF DETECTING ABNORMALITY IN POLISHING OF A SUBSTRATE AND POL...
- Publication number 20170312879
- Publication date Nov 2, 2017
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20170178940
- Publication date Jun 22, 2017
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETECTING ABNORMALITY IN POLISHING OF A SUBSTRATE AND POL...
- Publication number 20160114455
- Publication date Apr 28, 2016
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF DETECTING ABNORMALITY IN POLISHING OF A SUBSTRATE AND POL...
- Publication number 20140087627
- Publication date Mar 27, 2014
- Tetsuji TOGAWA
- B24 - GRINDING POLISHING