Hiroyuki TAKENAKA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Current measuring module using inspection substrate and inspection...
- Patent number 10,830,834
- Issue date Nov 10, 2020
- Ebara Corporation
- Masaki Tomita
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CURRENT MEASURING MODULE USING INSPECTION SUBSTRATE AND INSPECTION...
- Publication number 20190219627
- Publication date Jul 18, 2019
- EBARA CORPORATION
- Masaki TOMITA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM HAVING PROGRAM ST...
- Publication number 20180336301
- Publication date Nov 22, 2018
- EBARA CORPORATION
- Yu ISHII
- G06 - COMPUTING CALCULATING COUNTING