Hiroyuki Tanaka

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Nagaoka-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for positioning wafers in multiple wafer transport
- Patent number 9,793,148
- Issue date Oct 17, 2017
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Positioning Wafers in Multiple Wafer Transport
- Publication number 20120325148
- Publication date Dec 27, 2012
- ASM JAPAN K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS