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Hiroyuki TOSHIMA
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Sputtering apparatus
Patent number
12,014,911
Issue date
Jun 18, 2024
Tokyo Electron Limited
Shota Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for performing sputtering process
Patent number
11,851,750
Issue date
Dec 26, 2023
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus and film forming method
Patent number
11,742,190
Issue date
Aug 29, 2023
Tokyo Electron Limited
Einstein Noel Abarra
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus and sputtering method
Patent number
11,705,315
Issue date
Jul 18, 2023
Tokyo Electron Limited
Shota Ishibashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-forming apparatus, film-forming system, and film-forming method
Patent number
11,664,207
Issue date
May 30, 2023
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods to reshape spacer profiles in self-aligned multiple patterning
Patent number
11,551,930
Issue date
Jan 10, 2023
Tokyo Electron Limited
Akiteru Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
11,512,388
Issue date
Nov 29, 2022
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation device and film formation method
Patent number
11,495,446
Issue date
Nov 8, 2022
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and method
Patent number
11,479,848
Issue date
Oct 25, 2022
Tokyo Electron Limited
Shota Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hard mask and hard mask forming method
Patent number
11,469,106
Issue date
Oct 11, 2022
Tokyo Electron Limited
Hiroyuki Toshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film-forming device
Patent number
11,410,837
Issue date
Aug 9, 2022
Tokyo Electron Limited
Hiroyuki Toshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
11,158,492
Issue date
Oct 26, 2021
Tokyo Electron Limited
Hiroyuki Toshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming copper film
Patent number
10,189,230
Issue date
Jan 29, 2019
Tokyo Electron Limited
Hiroyuki Toshima
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method and processing apparatus for performing pre-treatment to for...
Patent number
10,068,798
Issue date
Sep 4, 2018
Tokyo Electron Limited
Hiroyuki Toshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming Cu wiring
Patent number
9,064,690
Issue date
Jun 23, 2015
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming copper wiring and method and system for forming c...
Patent number
8,859,422
Issue date
Oct 14, 2014
Tokyo Electron Limited
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetron sputtering apparatus
Patent number
8,617,363
Issue date
Dec 31, 2013
Tokyo Electron Limited
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming copper wiring and copper film, and film forming...
Patent number
8,399,353
Issue date
Mar 19, 2013
Tokyo Electron Limited
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PVD APPARATUS
Publication number
20230051865
Publication date
Feb 16, 2023
TOKYO ELECTRON LIMITED
Takuya SEINO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING APPARATUS AND SPUTTERING METHOD
Publication number
20220148863
Publication date
May 12, 2022
TOKYO ELECTRON LIMITED
Shota ISHIBASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS, FILM FORMING SYSTEM, AND FILM FORMING METHOD
Publication number
20220081757
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING APPARATUS AND FILM FORMING METHOD
Publication number
20220044920
Publication date
Feb 10, 2022
TOKYO ELECTRON LIMITED
Einstein Noel ABARRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PERFORMING SPUTTERING PROCESS
Publication number
20220025511
Publication date
Jan 27, 2022
TOKYO ELECTRON LIMITED
Masato SHINADA
G02 - OPTICS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
Publication number
20210305032
Publication date
Sep 30, 2021
TOKYO ELECTRON LIMITED
Shota ISHIBASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING APPARATUS
Publication number
20210296103
Publication date
Sep 23, 2021
TOKYO ELECTRON LIMITED
Shota ISHIBASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS AND METHOD
Publication number
20210207261
Publication date
Jul 8, 2021
TOKYO ELECTRON LIMITED
Shota ISHIBASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION DEVICE AND FILM FORMATION METHOD
Publication number
20210118653
Publication date
Apr 22, 2021
TOKYO ELECTRON LIMITED
Masato SHINADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARD MASK AND HARD MASK FORMING METHOD
Publication number
20200266063
Publication date
Aug 20, 2020
TOKYO ELECTRON LIMITED
Hiroyuki TOSHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARD MASK AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20200227273
Publication date
Jul 16, 2020
TOKYO ELECTRON LIMITED
Hiroyuki TOSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS TO RESHAPE SPACER PROFILES IN SELF-ALIGNED MULTIPLE PATTERNING
Publication number
20200194261
Publication date
Jun 18, 2020
TOKYO ELECTRON LIMITED
Akiteru Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM-FORMING DEVICE
Publication number
20200071815
Publication date
Mar 5, 2020
TOKYO ELECTRON LIMITED
Hiroyuki TOSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING APPARATUS, FILM-FORMING SYSTEM, AND FILM-FORMING METHOD
Publication number
20200051796
Publication date
Feb 13, 2020
TOKYO ELECTRON LIMITED
Masato SHINADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Forming Apparatus and Film Forming Method
Publication number
20200048759
Publication date
Feb 13, 2020
TOKYO ELECTRON LIMITED
Masato SHINADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20200043711
Publication date
Feb 6, 2020
TOKYO ELECTRON LIMITED
Hiroyuki Toshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING COPPER FILM
Publication number
20180001597
Publication date
Jan 4, 2018
Hiroyuki TOSHIMA
B32 - LAYERED PRODUCTS
Information
Patent Application
METHOD AND PROCESSING APPARATUS FOR PERFORMING PRE-TREATMENT TO FOR...
Publication number
20170372951
Publication date
Dec 28, 2017
TOKYO ELECTRON LIMITED
Hiroyuki TOSHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS
Publication number
20160071707
Publication date
Mar 10, 2016
TOKYO ELECTRON LIMITED
Shinji FURUKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...
Publication number
20140287163
Publication date
Sep 25, 2014
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL...
Publication number
20140060572
Publication date
Mar 6, 2014
TOKYO ELECTRON LIMITED
Chiaki YASUMURO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING CU WIRING
Publication number
20140045329
Publication date
Feb 13, 2014
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20130237053
Publication date
Sep 12, 2013
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETRON SPUTTERING APPARATUS
Publication number
20130105309
Publication date
May 2, 2013
TOKYO ELECTRON LIMITED
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETRON SPUTTERING APPARATUS AND METHOD
Publication number
20130081938
Publication date
Apr 4, 2013
Shigeru MIZUNO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD, RESPUTTERING METHOD, AND FILM FORMING APPARATUS
Publication number
20120247949
Publication date
Oct 4, 2012
Takashi SAKUMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...
Publication number
20120196052
Publication date
Aug 2, 2012
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF FORMING COPPER WIRING AND COPPER FILM, AND FILM FORMING...
Publication number
20120196437
Publication date
Aug 2, 2012
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20110017706
Publication date
Jan 27, 2011
TOKYO ELECTRON LIMITED
Tetsuro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND ST...
Publication number
20080184543
Publication date
Aug 7, 2008
TOKYO ELECTRON LIMITED
Takuji Sako
H01 - BASIC ELECTRIC ELEMENTS