Hiroyuki Uesugi

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Patents Grantslast 30 patents

Information Patent Grant
Chemical vapor deposition apparatus, film forming method, and metho...
- Patent number 8,409,983
- Issue date Apr 2, 2013
- Fujitsu Semiconductor Limited
- Hiroyuki Uesugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of planarized insulating film by plasma-enhanced CVD of o...
- Patent number 5,567,661
- Issue date Oct 22, 1996
- Fujitsu Limited
- Hidetoshi Nishio
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS, FILM FORMING METHOD, AND METHO...
- Publication number 20090286398
- Publication date Nov 19, 2009
- Fujitsu Microelectronics Limited
- Hiroyuki Uesugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...