TREA

Hiroyuki WADA

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus and method of operating film forming apparatus
    • Patent number 11,613,811
    • Issue date Mar 28, 2023
    • Tokyo Electron Limited
    • Jun Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Cleaning method of deposition apparatus
    • Patent number 11,473,194
    • Issue date Oct 18, 2022
    • Tokyo Electron Limited
    • Jun Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film formation apparatus
    • Patent number 10,550,467
    • Issue date Feb 4, 2020
    • Tokyo Electron Limited
    • Hiroaki Ikegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film formation apparatus
    • Patent number 10,519,550
    • Issue date Dec 31, 2019
    • Tokyo Electron Limited
    • Hiroaki Ikegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND CONTROL POSITION SETTING METHOD
    • Publication number 20240297061
    • Publication date Sep 5, 2024
    • TOKYO ELECTRON LIMITED
    • Ryoya TOMINAGA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20240209507
    • Publication date Jun 27, 2024
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND METHOD OF OPERATING FILM FORMING APPARATUS
    • Publication number 20210095375
    • Publication date Apr 1, 2021
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CLEANING METHOD OF DEPOSITION APPARATUS
    • Publication number 20200299835
    • Publication date Sep 24, 2020
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Formation Apparatus
    • Publication number 20170183777
    • Publication date Jun 29, 2017
    • TOKYO ELECTRON LIMITED
    • Hiroaki IKEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION APPARATUS
    • Publication number 20170183779
    • Publication date Jun 29, 2017
    • TOKYO ELECTRON LIMITED
    • Hiroaki IKEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...