Hiroyuki Yokohara

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus
- Patent number 12,077,848
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Kanto Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature measuring mechanism, temperature measuring method, and...
- Patent number 11,605,547
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- G01 - MEASURING TESTING
Information Patent Grant
Film forming apparatus
- Patent number 11,551,918
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Kenichi Imakita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage device and processing apparatus
- Patent number 11,417,504
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD processing method and PVD processing apparatus
- Patent number 11,193,200
- Issue date Dec 7, 2021
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fixing unit of plate-shaped member, PVD processing apparatus and fi...
- Patent number 10,254,693
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Hiroyuki Yokohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure and plasma film forming apparatus
- Patent number 9,324,600
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20220341028
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Kanto NAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220336194
- Publication date Oct 20, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki YOKOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220098717
- Publication date Mar 31, 2022
- TOKYO ELECTRON LIMITED
- Kenichi IMAKITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20200381226
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Kenichi IMAKITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASURING MECHANISM, TEMPERATURE MEASURING METHOD, AND...
- Publication number 20200303223
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
- Publication number 20200135434
- Publication date Apr 30, 2020
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD PROCESSING METHOD AND PVD PROCESSING APPARATUS
- Publication number 20190169737
- Publication date Jun 6, 2019
- TOKYO ELECTRON LIMITED
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIXING UNIT OF PLATE-SHAPED MEMBER, PVD PROCESSING APPARATUS AND FI...
- Publication number 20150370204
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Hiroyuki YOKOHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOUNTING TABLE STRUCTURE AND PLASMA FILM FORMING APPARATUS
- Publication number 20130001076
- Publication date Jan 3, 2013
- TOKYO ELECTRON LIMITED
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, RESPUTTERING METHOD, AND FILM FORMING APPARATUS
- Publication number 20120247949
- Publication date Oct 4, 2012
- Takashi SAKUMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hiroyuki Yokohara

Person

Patents Grantslast 30 patents

Vacuum processing apparatus

Temperature measuring mechanism, temperature measuring method, and...

Film forming apparatus

Stage device and processing apparatus

PVD processing method and PVD processing apparatus

Fixing unit of plate-shaped member, PVD processing apparatus and fi...

Mounting table structure and plasma film forming apparatus

Patents Applicationslast 30 patents

VACUUM PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM FORMING APPARATUS

TEMPERATURE MEASURING MECHANISM, TEMPERATURE MEASURING METHOD, AND...

STAGE DEVICE AND PROCESSING APPARATUS

PVD PROCESSING METHOD AND PVD PROCESSING APPARATUS

FIXING UNIT OF PLATE-SHAPED MEMBER, PVD PROCESSING APPARATUS AND FI...

MOUNTING TABLE STRUCTURE AND PLASMA FILM FORMING APPARATUS

FILM FORMING METHOD, RESPUTTERING METHOD, AND FILM FORMING APPARATUS