Hiroyuki Yoshiki

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Toyonaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus for radiating microwave from rectangula...
- Patent number 5,843,236
- Issue date Dec 1, 1998
- Daihen Corporation
- Hiroyuki Yoshiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus comprising means for generating rotatin...
- Patent number 5,440,206
- Issue date Aug 8, 1995
- Tokyo Electron Ltd.
- Yoichi Kurono
- H01 - BASIC ELECTRIC ELEMENTS