Hiroyuki Yuuki

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Detection apparatus
- Patent number 8,437,004
- Issue date May 7, 2013
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G01 - MEASURING TESTING
Information Patent Grant
Projection optical system with rarefaction compensation
- Patent number 8,432,532
- Issue date Apr 30, 2013
- Canon Kabushiki Kaisha
- Hiroyuki Yuuki
- G02 - OPTICS
Information Patent Grant
Projection optical system
- Patent number 7,714,985
- Issue date May 11, 2010
- Canon Kabushiki Kaisha
- Hiroyuki Yuuki
- G02 - OPTICS
Information Patent Grant
Projection optical system, exposure apparatus, and device fabricati...
- Patent number 7,706,075
- Issue date Apr 27, 2010
- Canon Kabushiki Kaisha
- Hiroyuki Yuuki
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
DETECTION APPARATUS
- Publication number 20110109908
- Publication date May 12, 2011
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICATI...
- Publication number 20100091361
- Publication date Apr 15, 2010
- Canon Kabushiki Kaisha
- Hiroyuki Yuuki
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICATI...
- Publication number 20090027781
- Publication date Jan 29, 2009
- Canon Kabushiki Kaisha
- Hiroyuki Yuuki
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICAL SYSTEM
- Publication number 20070297047
- Publication date Dec 27, 2007
- Canon Kabushiki Kaisha
- Hiroyuki Yuuki
- G02 - OPTICS