Hisaaki MIYASAKO

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Kanagawa, JP

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Patents Applicationslast 30 patents

Information Patent Application
DRYING APPARATUS, DRY CONDITION CONFIRMATION METHOD, AND WAFER STOR...
- Publication number 20240328713
- Publication date Oct 3, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Yukinobu NISHIBE
- F26 - DRYING
Information Patent Application
WAFER STORAGE CONTAINER DRYING APPARATUS AND CLEANING SYSTEM
- Publication number 20240302099
- Publication date Sep 12, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
- Publication number 20240091828
- Publication date Mar 21, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING