Hisakazu Nakayama

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus, and control method of heater...
- Patent number 10,422,551
- Issue date Sep 24, 2019
- Tokyo Electron Limited
- Hisakazu Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid heating unit, liquid processing apparatus including the same...
- Patent number 8,670,656
- Issue date Mar 11, 2014
- Tokyo Electron Limited
- Toshihiko Nishida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature control for performing heat process in coating/developi...
- Patent number 7,868,270
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Jun Ookura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control for performing heat process on resist film
- Patent number 7,755,003
- Issue date Jul 13, 2010
- Tokyo Electron Limited
- Jun Ookura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, processing system, distinguishing method, and...
- Patent number 6,654,668
- Issue date Nov 25, 2003
- Tokyo Electron Limited
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, AND CONTROL METHOD OF HEATER...
- Publication number 20160305688
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Hisakazu Nakayama
- F24 - HEATING RANGES VENTILATING
Information Patent Application
Liquid Heating Unit, Liquid Processing Apparatus Including the Same...
- Publication number 20120063754
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Toshihiko Nishida
- F24 - HEATING RANGES VENTILATING
Information Patent Application
TEMPERATURE CONTROL FOR PERFORMING HEAT PROCESS IN COATING/DEVELOPI...
- Publication number 20080283515
- Publication date Nov 20, 2008
- TOKYO ELECTRON LIMITED
- Jun Ookura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL FOR PERFORMING HEAT PROCESS ON RESIST FILM
- Publication number 20080156785
- Publication date Jul 3, 2008
- TOKYO ELECTRON LIMITED
- Jun Ookura
- H01 - BASIC ELECTRIC ELEMENTS