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Hisaki Ishida
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Nirasaki, JP
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last 30 patents
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Patent Grant
Temperature measuring apparatus
Patent number
8,608,378
Issue date
Dec 17, 2013
Tokyo Electron Limited
Hisaki Ishida
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
TEMPERATURE MEASURING APPARATUS
Publication number
20120269229
Publication date
Oct 25, 2012
TOKYO ELECTRON LIMITED
Hisaki Ishida
G01 - MEASURING TESTING
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Patent Application
WAFER-TYPE TEMPERATURE SENSOR AND MANUFACTURING METHOD THEREOF
Publication number
20110233546
Publication date
Sep 29, 2011
TOKYO ELECTRON LIMITED
Koudai Higashi
G01 - MEASURING TESTING