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last 30 patents
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Patent Grant
Box-shaped facing-targets sputtering apparatus and method for produ...
Patent number
7,135,097
Issue date
Nov 14, 2006
FTS Corporation
Sadao Kadokura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Facing-targets-type sputtering apparatus
Patent number
6,881,311
Issue date
Apr 19, 2005
FTS Corporation
Sadao Kadokura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Box-shaped facing-targets sputtering apparatus and method for produ...
Publication number
20050023129
Publication date
Feb 3, 2005
FTS CORPORATION
Sadao Kadokura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Facing-targets-type sputtering apparatus
Publication number
20030094365
Publication date
May 22, 2003
FTS CORPORATION
Sadao Kadokura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...