Hisanori Sakai

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 6,985,215
- Issue date Jan 10, 2006
- Tokyo Electron Limited
- Hin Oh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DATA PROCESSING APPARATUS, DATA PROCESSING SYSTEM, DATA PROCESSING...
- Publication number 20230118026
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Hitoshi YONEMICHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CALIBRATION APPARATUS AND CALIBRATION METHOD
- Publication number 20220341844
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Yuto USUKI
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200303169
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Hisanori SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing method and plasma processing apparatus
- Publication number 20050146709
- Publication date Jul 7, 2005
- TOKYO ELECTRON LIMITED
- Hin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Prediction method and apparatus of a processing result
- Publication number 20040181299
- Publication date Sep 16, 2004
- TOKYO ELECTRON LIMITED
- Yoshihiro Yamazaki
- G05 - CONTROLLING REGULATING